Surface sensitive analysis

WWWT
Equipment
Surface sensitive analysis

Nanoindentation system

Tip configurations

Berkovich - standard nanoindentation

Cube corner - scratch testing and fracture restistance

Evaluation according to Oliver & Pharr

Force range up to 400 mN

Ultra thermal scan

wafer curvature measuring system

Thermal Scans up to 1000 °C

Annealing environments: Argon

UHV vacuum upgrade in development

Nanovea PS50 White-light interferometer

chromatic confocal measuring principle

Evaluation of biaxial stress state in thin film deposition

Testing parameters:

X-Y Scan Area: 50x50 mm
Scan Speed: 20 mm/s

Nanovea T50

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Surface sensitive analysis

Ultra micro indentation system

wafer curvature measuring system

Profilometre

Tribometre