MST
MEMS Technology Lab

MEMS Technology Lab

The MEMS Technology Lab at ISAS enables the complete manufacture of MEMS structures from the wafer up to dicing and wire bonding of indidivual dies.

Some examples...

Sputter deposition system

Sputtering equipment in a laboratory with gas cabinets and a chemistry bench in the background

DC/RF magnetron sputter deposition

LPCVD

Low Pressure Chemical Vapour Deposition

Photo lithography

DRIE

Deep Reactive Ion Etching (Bosch process)

PECVD

Plasma Enhanced Chemical Vapour Deposition

Sputter deposition system

[Translate to English:] Vakuumabscheideanlage

Dual Ion Beam Sputter Deposition

Kontakt

Univ.Prof. Dipl.-Phys. Dr.rer.nat. Ulrich Schmid

Phone: +43 1 58801 36689 Call Ulrich Schmid

Send email to Ulrich Schmid

Kontakt

Univ.Prof. Dipl.-Phys. Dr.rer.nat. Ulrich Schmid

Phone: +43 1 58801 36689 Call Ulrich Schmid

Send email to Ulrich Schmid

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